Suspended photonic waveguide devices

被引：12

作者：

Stievater, Todd H. ^{[1
]}

Pruessner, Marcel W. ^{[1
]}

Rabinovich, William S. ^{[1
]}

Park, Doewon ^{[1
]}

Mahon, Rita ^{[1
]}

Kozak, Dmitry A. ^{[1
]}

Boos, J. Bradley ^{[1
]}

Holmstrom, Scott A. ^{[2
]}

Khurgin, Jacob B. ^{[3
]}

机构：

[1] Naval Res Lab, Washington, DC 20375 USA

[2] Univ Tulsa, Dept Phys & Engn Phys, Tulsa, OK 74104 USA

[3] Johns Hopkins Univ, Dept Elect Engn, Baltimore, MD 21218 USA

来源：

APPLIED OPTICS | 2015年 / 54卷 / 31期

关键词：

DIFFERENCE-FREQUENCY-GENERATION; FABRY-PEROT MICROCAVITIES; SILICON-ON-INSULATOR; 1.55; MU-M; RAMAN-SCATTERING; RADIATION-PRESSURE; THZ GENERATION; NANOMECHANICAL OSCILLATOR; OPTOMECHANICAL SYSTEM; BRAGG MIRRORS;

D O I：

10.1364/AO.54.00F164

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This article describes recent research at the U.S. Naval Research Laboratory that focuses on the use of micro-and nanomachining techniques for photonic waveguide devices. By selectively etching a sacrificial layer that the waveguide core is supported by, in whole or in part, the waveguide obtains enhanced properties and functionality, such as mechanical flexibility, index contrast, birefringence, and evanescent field depth. We describe how these properties enable unique waveguide applications in areas such as cavity optomechanics, displacement sensing, electro-optics, and nonlinear optics.

引用

页码：F164 / F173

页数：10

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