Micromachining of NiTi foils using a Q-switched Nd:YAG laser

Shape Memory Alloys (SMA) have the potential to become a material of great importance as innovative actuation principle in microsystem technologies, exhibiting high energy density, freedom of design, and various kinds of movements. For the microfabrication of SMA elements, a new laser assisted technology is being developed. Thin NiTi foils are micromachined, using a Q-switched Nd:YAG-laser at a wavelength of 1064 nm and an average power of 7 W. In a subsequent wet chemical etch process, the heat affected zone is removed in order to improve the mechanical properties of the SMA elements. In comparison, the NiTi foil has been machined using a Ti:Sapphir-laser, generating ultra short pulses. As an application of the SMA elements, a multiactuator system is presented.