Diffraction diamond grating formed by silver-ion mask implantation

被引：5
|
作者：
Stepanov, A. L. [1 ]
Nuzhdin, V. I. [1 ]
Kazuchits, N. M. [2 ]
Valeev, V. F. [1 ]
机构：
[1] Russian Acad Sci, Kazan Phys Tech Inst, Kazan 420029, Russia
[2] Belarusian State Univ, Minsk 220030, BELARUS
来源：
VACUUM | 2019年 / 164卷
关键词：
Diamond; Ion implantation; Silver nanoparticles; Diffraction grating; OPTICAL-PROPERTIES; NANOPARTICLES; FILMS;
D O I：
10.1016/j.vacuum.2019.03.045
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：332 / 335
页数：4
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