Atomic layer deposition of W on nanoporous carbon aerogels

被引:42
|
作者
Elam, J. W. [1 ]
Libera, J. A. [1 ]
Pellin, M. J. [1 ]
Zinovev, A. V. [1 ]
Greene, J. P. [1 ]
Nolen, J. A. [1 ]
机构
[1] Argonne Natl Lab, Argonne, IL 60439 USA
关键词
D O I
10.1063/1.2245216
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this study, the authors demonstrate the ability to apply precise, conformal W coatings onto all surfaces of nanoporous carbon aerogels using atomic layer deposition (ALD). The resulting material has a filamentous structure in which the W completely encapsulates the carbon aerogel strands. The material mass increases nonlinearly with W coating, achieving a tenfold increase following ten ALD cycles. The aerogel surface area increases by nearly a factor of 2 after ten W ALD cycles. This conformal metal coating of extremely high aspect ratio nanoporous materials by ALD represents a unique route to forming metal functionalized high surface area materials.
引用
收藏
页数:3
相关论文
共 50 条
  • [1] Refractory nanoporous materials fabricated using tungsten atomic layer deposition on silica aerogels
    Mane, Anil U.
    Greene, John P.
    Nolen, Jerry A.
    Sampathkumaran, Uma
    Owen, Thomas W.
    Winter, Ray
    Elam, Jeffrey W.
    APPLIED SURFACE SCIENCE, 2012, 258 (17) : 6472 - 6478
  • [2] Atomic layer deposition of nanoporous biomaterials
    Narayan, Roger J.
    Adiga, Shashishekar P.
    Pellin, Michael J.
    Curtiss, Larry A.
    Stafslien, Shane
    Chisholm, Bret
    Monteiro-Riviere, Nancy A.
    Brigmon, Robin L.
    Elam, Jeffrey W.
    MATERIALS TODAY, 2010, 13 (03) : 60 - 64
  • [3] Ultralow loading Pt nanocatalysts prepared by atomic layer deposition on carbon aerogels
    King, Jeffrey S.
    Wittstock, Arne
    Biener, Juergen
    Kucheyev, Sergei O.
    Wang, Yinmin M.
    Baumann, Theodore F.
    Giri, Sandeep K.
    Hamza, Alex V.
    Baeumer, Marcus
    Bent, Stacey F.
    NANO LETTERS, 2008, 8 (08) : 2405 - 2409
  • [4] Atomic layer deposition in nanoporous catalyst materials
    Dendooven, Jolien
    RSC Catalysis Series, 2015, 2015-January (22): : 167 - 197
  • [5] Tailoring nanoporous materials by atomic layer deposition
    Detavernier, Christophe
    Dendooven, Jolien
    Sree, Sreeprasanth Pulinthanathu
    Ludwig, Karl F.
    Martens, Johan A.
    CHEMICAL SOCIETY REVIEWS, 2011, 40 (11) : 5242 - 5253
  • [6] Atomic layer deposition for the conformal coating of nanoporous materials
    Elam, Jeffrey W.
    Xiong, Guang
    Han, Catherine Y.
    Wang, H. Hau
    Birrell, James P.
    Welp, Ulrich
    Hryn, John N.
    Pellin, Michael J.
    Baumann, Theodore F.
    Poco, John F.
    Satcher, Joe H., Jr.
    JOURNAL OF NANOMATERIALS, 2006, 2006
  • [7] Coating of Nanoporous Membranes: Atomic Layer Deposition versus Sputtering
    Grigoras, K.
    Airaksinen, V. -M.
    Franssila, S.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (06) : 3763 - 3770
  • [8] Tuning functional nanoparticulate and nanoporous structures using atomic layer deposition
    Jiang, Yingbing
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 253
  • [9] Multiscale Simulation and Optimization of an Atomic Layer Deposition Process in a Nanoporous Material
    Dwivedi, Vivek
    Adomaitis, Raymond A.
    EUROCVD 17 / CVD 17, 2009, 25 (08): : 115 - 122
  • [10] Composite materials and nanoporous thin layers made by atomic layer deposition
    Ghazaryan, Lilit
    Kley, Ernst-Bernhard
    Tuennermann, Andreas
    Szeghalmi, Adriana
    OPTICAL SYSTEMS DESIGN 2015: ADVANCES IN OPTICAL THIN FILMS V, 2015, 9627