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- [4] Piezoresistive microcantilevers for in situ stress measurements during thin film deposition -: art. no. 075103 REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (07):
- [5] Thermodynamics of ionic microgels -: art. no. 036143 PHYSICAL REVIEW E, 2002, 65 (03): : 1 - 036143
- [10] Rigorous CMP and electroplating simulations for DFM applications - art. no. 692507 DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION II, 2008, 6925 : 92507 - 92507