Role of film-substrate interface in the internal friction of nanocrystalline diamond films

被引:0
|
作者
Metcalf, Thomas H.
Liu, Xiao
Houston, Brian H.
Butler, James E.
Feygelson, Tatyana
机构
[1] USN, Res Lab, Washington, DC 20375 USA
[2] GeoCenters Inc, Ft Washington, MD 20749 USA
关键词
nanocrystalline diamond; internal friction;
D O I
10.1016/j.msea.2006.02.208
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In light of recent measurements which indicate a dominant role in the low-temperature internal friction for interface-layers of diamond films grown on silicon substrates, the internal friction of a series of four nanocrystalline diamond films was measured. The films, all 0.5 mu m thick, had internal friction silimar in magnitude to those reported before, Q(f)(-1) 4 approximate to 10(-6), below roughly 100 K. However, no dependence on interface-layer structure was found, contrary to expectations. The films did exhibit a low-temperature internal friction peak, at 1-2 K, which was also observed in previous films. Published by Elsevier B.V.
引用
收藏
页码:332 / 335
页数:4
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