A study of a high-resolution linear circuit for capacitive sensors

被引:12
|
作者
Karlsson, N [1 ]
机构
[1] Swedish Def Res Estab, Div Sensor Technol, SE-58111 Linkoping, Sweden
关键词
capacitive sensor; femtofarads (fF); linear circuit; low-capacitance measurement; offset compensation;
D O I
10.1109/19.816125
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A circuit for capacitance measurements is described. The circuit permits offset capacitance compensation using a de voltage. The electronic circuitry with its testing is described. The output voltage is a linear function of the capacitance measured. Experimental data show good agreement with values predicted by the linear formula. Experiments show it is possible to measure capacitance changes with a resolution of a few femtofarads (fF).
引用
收藏
页码:1122 / 1124
页数:3
相关论文
共 50 条
  • [1] A Flexible Low-Power High-Resolution Integrated Interface for Capacitive Sensors
    Heidary, Ali
    Shalmany, Saleh Heidary
    Meijer, Gerard
    IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS (ISIE 2010), 2010, : 3347 - 3350
  • [2] High-resolution CMOS sensors for a vertex detector at the Linear Collider
    Gay, A
    Claus, G
    Colledani, C
    Deptuch, G
    Deveaux, M
    Dulinski, W
    Gornushkin, Y
    GrandJean, D
    Himmi, A
    Hu, C
    Valin, I
    Winter, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2005, 549 (1-3): : 99 - 102
  • [3] AN ASIC FOR HIGH-RESOLUTION CAPACITIVE MICROACCELEROMETERS
    LEUTHOLD, H
    RUDOLF, F
    SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 278 - 281
  • [4] HIGH-RESOLUTION CAPACITIVE PRESSURE GAUGES
    ADAMS, ED
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (03): : 601 - 611
  • [5] Design and implement the readout circuit of an in-cell high-resolution capacitive touch panel
    Ku, Tsung-Yen
    Chao, Paul C. -P.
    Huang, Chin-Hai
    Liu, En-Chih
    Yeh, Ming-Hua
    Chen, Han-Chang
    Wang, Tong-Wen
    PROCEEDINGS OF THE ASME 26TH ANNUAL CONFERENCE ON INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 2017,
  • [6] Linear High-Resolution BioMEMS Force Sensors With Large Measurement Range
    Rajagopalan, Jagannathan
    Tofangchi, Alireza
    Saif, M. Taher A.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 19 (06) : 1380 - 1389
  • [7] IMPROVED HIGH-RESOLUTION PUMP CIRCUIT
    ZAFIROPOULOS, P
    ELECTRONIC ENGINEERING, 1969, 41 (493): : 360 - +
  • [8] High-resolution pyroelectric line sensors
    Sokoll, T.
    Norkus, V.
    Gerlach, G.
    Wissenschaftlinche Zeitschrift der Technischen Universitat Dresden, 46 (02):
  • [9] High-Resolution ADCs Design in Sensors
    Fan, Hua
    Yang, Jingxuan
    Maloberti, Franco
    Feng, Quanyuan
    Li, Dagang
    Hu, Daqian
    Cen, Yuanjun
    Heidari, Hadi
    2018 IEEE 9TH LATIN AMERICAN SYMPOSIUM ON CIRCUITS & SYSTEMS (LASCAS), 2018, : 31 - 34
  • [10] Study of CMOS integrated signal processing circuit in capacitive sensors
    曹一江
    于翔
    王磊
    Journal of Harbin Institute of Technology, 2007, (02) : 224 - 228