TiO2 nanotubes production and characterization

被引：0
|
作者：
Fraga, T. M. [1 ]
Albertin, K. F. [2 ]
Pereyra, I. [1 ]
机构：
[1] Univ Sao Paulo, PSI, LME, EPUSP, BR-05508900 Sao Paulo, Brazil
[2] Univ Fed ABC UFABC, CECS, BR-09210170 Santo Andre, SP, Brazil
来源：
MICROELECTRONICS TECHNOLOGY AND DEVICES - SBMICRO 2012 | 2012年 / 49卷 / 01期
关键词：
D O I：
10.1149/04901.0199ecst
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
TiO2 nanotubes arrays were obtained by Ti foil and Ti thin films on glass substrate, deposited by RF magnetron sputtering, anodization in a NH4F organic solution with different anodization voltages and times. Annealing treatment to promote nanotubes crystallization in anatase phase was done.. Different photolithography pattern techniques were utilized to define nanotubes lines from 10 to 90 mu m wide. The obtained samples were characterized by Raman spectroscopy and Scanning Electron Microscopy (SEM).
引用
收藏
页码：199 / 205
页数：7
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