Soil remediation is one of the most important issues in environmental engineering. In this study, the effect of phenanthrene, anthracene, and benz(a)anthracene chemical structures on their removal from different soil slurries were investigated. Also, the effects of initial pollution concentration, injected ozone, water content and processing time on soil remediation were examined by response surface methodology. In the optimized condition for the soil of industrial site, anthracene, phenanthrene, and benz(a)anthracene have 67.87%, 85.2%, and 45.9% removal efficiencies, respectively. Based on these results, better water solubility, and less fine-grained soil particles are contributors to more efficient soil remediation system by ozonation.