High-Brightness Blue Light-Emitting Diodes Enabled by a Directly Grown Graphene Buffer Layer

被引:114
|
作者
Chen, Zhaolong [1 ]
Zhang, Xiang [2 ,3 ,8 ]
Dou, Zhipeng [1 ,4 ,5 ,6 ]
Wei, Tongbo [2 ,3 ]
Liu, Zhiqiang [2 ,3 ]
Qi, Yue [1 ]
Ci, Haina [1 ]
Wang, Yunyu [2 ,3 ]
Li, Yang [2 ,3 ]
Chang, Hongliang [2 ,3 ]
Yan, Jianchang [2 ,3 ]
Yang, Shenyuan [7 ,8 ]
Zhang, Yanfeng [1 ,9 ]
Wang, Junxi [2 ,3 ]
Gao, Peng [1 ,4 ,5 ,10 ]
Li, Jinmin [3 ]
Liu, Zhongfan [1 ,9 ]
机构
[1] Peking Univ, Beijing Sci & Engn Ctr Nanocarbons, Ctr Nanochem CNC, Coll Chem & Mol Engn, Beijing 100871, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, State Key Lab Solid State Lighting, Beijing 100083, Peoples R China
[3] Beijing Engn Res Ctr 3rd Generat Semicond Mat & A, Beijing 100083, Peoples R China
[4] Peking Univ, Sch Phys, Electron Microscopy Lab, Beijing 100871, Peoples R China
[5] Peking Univ, Sch Phys, Int Ctr Quantum Mat, Beijing 100871, Peoples R China
[6] Hunan Univ, Sch Phys & Elect, Key Lab Micro Nanooptoelect Devices, Minist Educ, Changsha 410082, Hunan, Peoples R China
[7] Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
[8] Univ Chinese Acad Sci, Sch Microelect, Beijing 101408, Peoples R China
[9] BGI, Beijing 100095, Peoples R China
[10] Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China
基金
北京市自然科学基金; 中国国家自然科学基金; 国家重点研发计划;
关键词
chemical vapor deposition; gallium nitride; graphene; light-emitting diodes; EPITAXIAL GRAPHENE; PATTERNED SAPPHIRE; GAN; FILMS; SPECTROSCOPY; NANOSHEETS; NANOWIRES; NANOTUBES; EMISSION; QUALITY;
D O I
10.1002/adma.201801608
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Single-crystalline GaN-based light-emitting diodes (LEDs) with high efficiency and long lifetime are the most promising solid-state lighting source compared with conventional incandescent and fluorescent lamps. However, the lattice and thermal mismatch between GaN and sapphire substrate always induces high stress and high density of dislocations and thus degrades the performance of LEDs. Here, the growth of high-quality GaN with low stress and a low density of dislocations on graphene (Gr) buffered sapphire substrate is reported for high-brightness blue LEDs. Gr films are directly grown on sapphire substrate to avoid the tedious transfer process and GaN is grown by metal-organic chemical vapor deposition (MOCVD). The introduced Gr buffer layer greatly releases biaxial stress and reduces the density of dislocations in GaN film and InxGa1-xN/GaN multiple quantum well structures. The as-fabricated LED devices therefore deliver much higher light output power compared to that on a bare sapphire substrate, which even outperforms the mature process derived counterpart. The GaN growth on Gr buffered sapphire only requires one-step growth, which largely shortens the MOCVD growth time. This facile strategy may pave a new way for applications of Gr films and bring several disruptive technologies for epitaxial growth of GaN film and its applications in high-brightness LEDs.
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页数:8
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