Si3N4-TiN-Y2O3 ceramics derived from chemically modified perhydropolysilazane

被引:16
|
作者
Iwamoto, Y
Kikuta, K
Hirano, S
机构
[1] Fine Ceram Res Assoc, Synergy Ceram Lab, Atsuta Ku, Nagoya, Aichi 4568587, Japan
[2] Nagoya Univ, Grad Sch Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
关键词
D O I
10.1557/JMR.1999.0582
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[Si-Y-Ti-O-C-N] multicomponent powders were synthesized by pyrolysis at 1000 degrees C, in NH3 flow, of chemically modified perhydropolysilazane using 4 yttrium triisopropoxide and titanium tetrachloride. [Si-Y-Ti-O-C-N] powders yielded uniform and fine-grained Si3N4-TiN-Y2O3 ceramics by heat treatment at 1800 degrees C in N-2. The fully densified Si3N4-TiN-Y2O3 ceramics were also synthesized by heat treatment at 1800 degrees C, followed by powder-vehicle hot pressing at 1800 degrees C in N-2. The resulting ceramics revealed that TN was dispersed as particles having a size range of about 60-600 nm and the fine particles less than 80 nm were dispersed within the beta-Si3N4 matrix grains.
引用
收藏
页码:4294 / 4301
页数:8
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