HIGH PERMITTIVITY FERROELECTRIC ACTUATORS FOR RADAR APPLICATIONS

被引：0
|
作者：
Ficklen, J. [1 ]
Weaver, J. [2 ]
Chen, C. [2 ]
Ayon, A. A. [1 ]
机构：
[1] Univ Texas San Antonio, MEMS Res Lab, 1 UTSA Circle, San Antonio, TX 78249 USA
[2] Univ Texas San Antonio, Dept Phys & Astron, San Antonio, TX 78249 USA
来源：
DTIP 2009: SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS | 2009年
关键词：
PHASE SHIFTERS; MEMS; SWITCHES;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report a new method of fabricating thermal bimorph actuators utilizing high permittivity ferroelectric thin films. This device is the first known thermal cantilever actuator employing barium titanate (BaTiO3) for RF applications. Compared to electrostatic actuators, this MEMS structure is designed to handle high RF transmitted power while maintaining a high capacitance ratio due to the high permittivity of the ferroelectric thin film employed and without the stiction problems normally associated with other MEMS actuators.
引用
收藏
页码：412 / +
页数：2
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