Photoconductivity of TiO2 films deposited by PECVD

被引：2
|
作者：
Kolouch, A.
Hajkova, P.
Spatenka, P.
Heydukova, E.
Exnar, P.
Spatenka, P.
机构：
[1] Tech Univ Liberec, Fac Mech Engn, Dept Mat Sci, Liberec 46117, Czech Republic
[2] Tech Univ Liberec, Fac Educ, Dept Chem, Liberec 46117, Czech Republic
[3] Univ S Bohemia, Dept Phys, CZ-37001 Ceske Budejovice, Czech Republic
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 2006年 / 56卷
关键词：
titanium oxide; PECVD; thin films;
D O I：
10.1007/s10582-006-0356-3
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
TiO2 thin films were prepared by PECVD technique from vapors of Titanium-IViso-propoxide mixed with oxygen at different temperatures. The films were deposited on substrates with system of special platinum electrodes and on glass substrates. Absorption spectra in the visible light region, photoconductivity and capacitance at different humidity, pbotocatalytic activity under UV irradiation and surface morphology were evaluated on the films. The results revealed that the photoconductivity is influenced by humidity and is connected to the photocatalytic activity.
引用
收藏
页码：B1237 / B1243
页数：7
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