X-ray reflectivity and grazing-incidence small-angle scattering studies of high-k dielectric films

被引：0
|
作者：
Allen, Andrew J. [1 ]
Green, Martin L. [1 ]
机构：
[1] NIST, Ceram Div, Gaithersburg, MD 20899 USA
来源：
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES | 2008年 / 64卷
关键词：
GISAXS; reflectivity; thin films;
D O I：
10.1107/S0108767308082172
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
P12.07.28
引用
收藏
页码：C555 / C555
页数：1
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