Effects of the pre-annealing temperature on structural and optical properties of sol-gel deposited aluminium doped zinc oxide

被引：3

作者：

Bu, Ian Y. Y. ^{[1
]}

机构：

[1] Natl Kaohsiung Marine Univ, Dept Microelect Engn, Kaohsiung 81157, Taiwan

来源：

CERAMICS INTERNATIONAL | 2014年 / 40卷 / 08期

关键词：

Sintering; Annealing; Aluminium doped zinc oxide; Optical; Sol-gel; THIN-FILMS; PREFERRED ORIENTATION; DOPING CONCENTRATION; ZNO FILMS; TRANSPARENT; NANOSTRUCTURES; FABRICATION; ACETATE;

D O I：

10.1016/j.ceramint.2014.04.030

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Highly transparent aluminium doped zinc oxide (AZO) thin films were deposited by the sol gel deposition technique. The effects of various pre-sintering temperatures on the film's structural, optical and electrical properties were investigated using scanning electron microscopy, X-ray diffraction spectroscopy, photoluminescence emission measurements, UV-vis spectroscopy and electrical characterization. It was found that the pre-sintering temperature greatly affected the film's structural properties and resulted in an almost 100% increase in grain size within the investigated experimental window. Photoluminescence emission and photovoltaic measurements confirmed that the best optoelectronic properties of AZO thin films can be achieved with a pre-sintering temperature of 400 degrees C. (C) 2014 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

引用

页码：11941 / 11946

页数：6

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