Modeling Fizeau interferometer based on ray tracing with Zemax

被引:0
|
作者
He Yiwei [1 ,2 ]
Hou Xi [1 ]
Wu Yongqian [1 ]
Wu Fan [1 ]
Quan Haiyang [1 ]
Liu, Fengwei [1 ]
机构
[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
关键词
modeling Fizeau interferometer; error analysis; lens design;
D O I
10.1117/12.2197612
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Error analysis based on ray-tracing interferometer models is a convenient method to study the influence of error sources. In this paper an interferometer model is presented; an extension program is called to simulate the interference; and a preliminary research of several error sources is conducted. These examples demonstrate error analysis based on interferometer models is feasible.
引用
收藏
页数:8
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