Characterization of QWIP structures prepared on GaAs-patterned substrates

被引:1
|
作者
Strichovanec, P. [1 ]
Kudela, R. [1 ]
Vavra, I. [1 ]
Novak, J. [1 ]
机构
[1] Slovak Acad Sci, Inst Elect Engn, Bratislava 84104, Slovakia
关键词
quantum well; photodetector; infrared; patterned substrate; MOCVD;
D O I
10.1016/j.mejo.2006.01.017
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work we investigate the preparation of quantum well infrared photodetectors (QWIP) on planar and patterned GaAs substrates. Mesa ridges with various angles between sidewall and substrate (100) plane were prepared by wet chemical etching. The QWIP structures were grown at a temperature of 700 degrees C by use of low-pressure MOVPE. Electrical properties And spectral sensitivity of QWIP structures prepared on tilted sidewalls were measured. Our results showed that mesa ridges confined at the sides by facets tilted at 30 degrees to (100) were most suitable for the QWIP preparation. Asymmetry in room temperature I-V characteristics and a small photovoltaic effect observed at 77 K was ascribed to asymmetric position of delta doping plane in the quantum well. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:888 / 891
页数:4
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