Acoustic resonant spectroscopy for characterization of thin polymer films

被引:22
|
作者
Tohmyoh, Hironori [1 ]
Imaizumi, Takuya [1 ]
Saka, Masumi [1 ]
机构
[1] Tohoku Univ, Dept Nanomech, Aoba Ku, Sendai, Miyagi 9808579, Japan
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 10期
关键词
D O I
10.1063/1.2356859
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An acoustic resonant spectroscopy technique for measuring the acoustic impedance, ultrasonic velocity, and density of micron-scale polymer films is developed. The method, which is based on spectral analysis, observes the acoustic resonance between water, the film, and a tungsten plate with high acoustic impedance in the frequency range of 20-70 MHz. The interface between the film being examined and the plate is vacuum sealed, enabling us to characterize the low-density polyethylene film with acoustic impedances as low as about 1.9 MN m(-3) s and the poly(vinyl chloride) film as thin as about 8 mu m. The error in the film density measurements is found to be less than 1%, and the validity of the technique is verified. (c) 2006 American Institute of Physics.
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页数:3
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