An investigation into nano-dimensional fractal film structures

被引：0

作者：

Serov, IN ^{[1
]}

Lukyanov, GN ^{[1
]}

Margolin, VI ^{[1
]}

Potsar, NA ^{[1
]}

Soltovskaya, IA ^{[1
]}

Fantikov, VS ^{[1
]}

机构：

[1] Aires New Medial Technol Fdn, St Petersburg, Russia

来源：

MICRO- AND NANOELECTRONICS 2003 | 2004年 / 5401卷

关键词：

Fraktal; matrix topology; strukturizator "Aires; nano-dimensional structure; magnetron ionic - plasma spattering; scanning electron microscopy; atomic-force microscopy;

D O I：

10.1117/12.558315

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work is dedicated to experimental studies of the action of fraktal- matrix strukturizator "Aires" on the processes of increasing on the thin nano-dimensional films of copper, titanium and number of others. It is established that under the action of strukturizators it is possible to obtain films with the clearly expressed fraktal structure, moreover at different levels. Are given the results of a study with the aid of optics, SEM and AFM of the microscopy. As a result of a complex of the lead researches influence fractal-matrix strukturizators on the processes proceeding at condensation thin nano-dimensional films from vapor or the plasma environment with use of methods magnetron ionic - plasma spattering and thermal vacuum evaporation is revealed.

引用

页码：278 / 289

页数：12

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