Temperature Dependence of the Solubility of Nitrogen in Liquid Silicon Equilibrated with Silicon Nitride

被引：10
|
作者：
Dalaker, Halvor [1 ]
Tangstad, Merete [1 ]
机构：
[1] Norwegian Univ Sci & Technol, Dept Mat Sci & Engn, N-7491 Trondheim, Norway
来源：
MATERIALS TRANSACTIONS | 2009年 / 50卷 / 11期
关键词：
silicon; nitrogen; solubility; thermodynamics; OXYGEN;
D O I：
10.2320/matertrans.M2009164
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The solubility of nitrogen in liquid silicon equilibrated with silicon nitride and its dependence on the composition of the atmosphere has been studied in the temperature region 1428-1542 degrees C. High purity silicon was melted in silicon nitride crucibles under Ar and N-2 atmospheres. The equilibrium was observed to be established within minutes, after which no evolution of the nitrogen content with time could be observed. The nitrogen transfer between the Si3N4-crucible and the melt was faster than the transfer via the gas-phase to such an extent that the composition of the atmosphere did not influence the solubility limit. The solubility limit as a function of temperature was found to follow: C-N(T, C-B) = 7957.9 * exp(-24376/T) At the melting point of silicon, this equation gives the solubility of nitrogen as 42 ppm mass. From this equation, a thermodynamic derivation led to the following expression for the dissolution energy of nitrogen: Delta G(0) = -1.63 * 10(4) + 26T [doi: 10.2320/matertrans.M2009164]
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收藏
页码：2541 / 2544
页数：4
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