Hot Embossing of Parallel v-Groove Microstructures on Glass

被引:6
|
作者
Hsu, Ray-Quen [1 ]
Wang, Hsing-Bun [1 ]
Liang, Da-Lan [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 300, Taiwan
关键词
FOCUSED ION-BEAM; CARBON MOLD;
D O I
10.1111/j.1551-2916.2009.03257.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A series of parallel v-groove microstructures was embossed on glass at an elevated temperature. The effects of glass temperature, applied pressure, holding time, and demold temperature on the conformity between the product and the tool were studied. We found that very precise microstructures can be fabricated on glass at temperatures about 35 degrees-55 degrees C above the glass transition temperatures. However, careful attention should be paid to the demold temperature and the mold release agent in order to prevent the tool from sticking to the glass.
引用
收藏
页码:2605 / 2608
页数:4
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