Integrating electro-discharge machining and photolithography: work in progress

This paper presents work in progress on the integration of micro-electro-discharge machining and photolithography. It is the aim to combine these two technologies in one microsystem. The case study of an inclinometer is used to verify the possibilities of such an integration First the inclinometer principle is briefly introduced. Also a technique to compare the mechanical performance to the calculated values is given. Then, the specific problems of manufacturing this device with electro-discharge machining and photolithography an discussed. The following aspects of inter-process compatibility are discussed: surface quality aspects, process compatibility, and inter-process alignment.