Characterization of a geometrically desensitized interferometer for flatness testing

被引：2

作者：

de Lega, XC ^{[1
]}

Biegen, J ^{[1
]}

Stephenson, D ^{[1
]}

de Groot, P ^{[1
]}

机构：

[1] Zygo Corp, Middlefield, CT 06455 USA

来源：

THREE-DIMENSIONAL IMAGING, OPTICAL METROLOGY, AND INSPECTION IV | 1998年 / 3520卷

关键词：

desensitized interferometry; flatness testing; diffraction gratings;

D O I：

10.1117/12.334344

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe the detailed design of a geometrically desensitized interferometer using two transmission diffraction gratings. A number of models of the instrument are used to eliminate object ghosts and stray light contributions. We then investigate analytically the influence of object slope variations on the instrument precision. We show that the part can be located at a measurement location where the metrology is optimized. Analytical and raytracing models demonstrate excellent agreement with experiment.

引用

页码：284 / 292

页数：9

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