Quasi-sinusoidal single-order diffraction transmission grating used in x-ray spectroscopy

被引：35

作者：

Kuang, Longyu ^{[1
,2
]}

Cao, Leifeng ^{[2
]}

Zhu, Xiaoli ^{[3
]}

Wu, Shunchao ^{[2
]}

Wang, Zhebin ^{[2
]}

Wang, Chuanke ^{[2
]}

Liu, Shenye ^{[2
]}

Jiang, Shaoen ^{[2
]}

Yang, Jiamin ^{[2
]}

Ding, Yongkun ^{[2
]}

Xie, Changqing ^{[3
]}

Zheng, Jian ^{[1
]}

机构：

[1] Univ Sci & Technol China, Dept Modern Phys, CAS Key Lab Basic Plasmas Phys, Hefei 230026, Anhui, Peoples R China

[2] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Sichuan, Peoples R China

[3] Chinese Acad Sci, Inst Microelect, Key Lab Nanofabricat & Novel Devices Integrated T, Beijing 100029, Peoples R China

来源：

OPTICS LETTERS | 2011年 / 36卷 / 20期

关键词：

SPECTROMETER; TARGETS;

D O I：

10.1364/OL.36.003954

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel design of quasi-sinusoidal single-order diffraction transmission grating (QSTG) is proposed, which can achieve a line density up to thousands line/millimeter as that of traditional transmission gratings with the current level of nanofabrication technique. We fabricate a 1000 line/mm QSTG using the new design approach, and display the calibration results of such QSTG on the soft x-ray beam of synchrotron radiation. (C) 2011 Optical Society of America

引用

页码：3954 / 3956

页数：3

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