Electro-mechanical properties and oxidation behaviour of TiAlNxOy thin films at high temperatures

被引：9

作者：

Zarfl, C. ^{[1
]}

Schmid, P. ^{[1
]}

Balogh, G. ^{[1
]}

Schmid, U. ^{[1
]}

机构：

[1] Vienna Univ Technol, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2015年 / 226卷

关键词：

TiAlN; TiAlON; Strain gauge; High temperature; Gauge factor; TCR; Oxidation; STRAIN; PRESSURE; SENSITIVITY; DEPOSITION; MORPHOLOGY; COATINGS;

D O I：

10.1016/j.sna.2015.02.026

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

TiAlNxOy thin films are investigated as possible candidates for high temperature stable strain gauge applications. The thin films are deposited by reactive magnetron sputtering on sapphire and silicon substrates with a thickness of 500 nm and 200 nm, respectively. The gauge factor is measured with a custom built setup up to 500 degrees C. At 100 degrees C this electro-mechanical parameter is about 2.5 and the mean value decreases by about 10% when exposed to the maximum temperature level applied in this study. The temperature coefficient of the electrical resistance (TCR) is measured under vacuum conditions. The TCR is negative and with a value of -5.13 x 10(-4) K-1 very low compared to +3 x 10(-3) K-1 determined at sputter-deposited platinum films. Furthermore, the influence of oxidation effects on the electro-mechanical film properties is investigated. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：143 / 148

页数：6

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