The structure test of the MEMS resonator

The design of the structure parameters, which determined the resonant frequency of the resonant oscillators in the plane direction and the vertical direction and influenced the vibrate amplitude, has a big influence on the mechanical characteristics of the resonant oscillator This paper analyzed the influences of the fabrication process on the structure parameters, which provides guarantee to the improvement of fabrication process. Based on the characteristic test, we researched the driving and testing circuit of the resonant oscillator. The result will offer many assist to the design of the micro-gyroscope, micro- accelerometer, micro-mirror based on the resonant oscillator.