Diamond coated cutting tools with low surface roughness

被引：0

作者：

Zhu, JL ^{[1
]}

Gou, L ^{[1
]}

Ran, JG ^{[1
]}

机构：

[1] Sichuan Univ, Dept Inorgan Mat, Chengdu 610065, Peoples R China

来源：

RARE METAL MATERIALS AND ENGINEERING | 2005年 / 34卷

关键词：

diamond coatings; roughness; cemented carbide;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The low surface roughness is essential to the application of the diamond coated cutting tools. The purpose of this study was to deposit diamond film with good adhesion and low surface roughness without post-treatment of polishing. Thin polycrystalline diamond films with two different layers have been successively deposited on gradient-cemented carbide using microwave plasma assisted chemical vapor deposition (MPCVD). Specimens were characterized with scanning electron microscopy (SEM), atomic force microscopy (AFM) and indentation test. Experimental results show that the appropriate lower substrate temperature and higher methane concentration are contacted with smaller diamond crystallite size. The high quality diamond coatings deposited under optimized process have lower surface roughness and good adherence; the surface roughness Ra is lower than 0.21 mu m.

引用

页码：302 / 304

页数：3