Broadband infrared mirror using guided-mode resonance in a subwavelength germanium grating

被引：21
|
作者：
Kontio, Juha M. [1 ]
Simonen, Janne [1 ]
Leinonen, Kari [2 ]
Kuittinen, Markku [2 ]
Niemi, Tapio [1 ]
机构：
[1] Tampere Univ Technol, Optoelect Res Ctr, FIN-33101 Tampere, Finland
[2] Univ Eastern Finland, Dept Math & Phys, FIN-80101 Joensuu, Finland
来源：
OPTICS LETTERS | 2010年 / 35卷 / 15期
基金：
芬兰科学院;
关键词：
D O I：
10.1364/OL.35.002564
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate a broadband mirror for the IR wavelength region comprising a subwavelength grating made of germanium. We design and optimize the guided-mode resonances in the structure for TM-polarized incident light by rigorous electromagnetic simulations. The grating structure is realized by nanoimprint lithography and dry etching. The reflectivity of the mirror is over 95% for the wavelength range between 2245 and 3080 nm. (C) 2010 Optical Society of America
引用
收藏
页码：2564 / 2566
页数：3
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