Impact of width effect on performance enhancement in NMOSFETs with silicon-carbon alloy stressor and stress CESL

被引：0
|
作者：
Wang, Wei-Ching [1 ]
Kuang, Shin-Jiun [1 ]
Chang, Shu-Tong [1 ]
Huang, Jacky [1 ]
Huang, C. -F. [2 ]
机构：
[1] Natl Chung Hsing Univ, Dept Elect Engn, Taichung 40227, Taiwan
[2] Natl Taiwan Univ, Grad Inst Elect Engn, Taichung, Taiwan
来源：
2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：266 / +
页数：2
相关论文
共 33 条
  • [1] Exploring the effect of width on performance enhancement in NMOSFETs with a silicon-carbon alloy stressor and a tensile stress silicon nitride liner
    Chang, Shu Tong
    Wang, Wei-Ching
    Huang, Jacky
    Liao, Shu-Hui
    Lin, Chung-Yi
    APPLIED SURFACE SCIENCE, 2008, 254 (19) : 6177 - 6181
  • [2] Stress Impact of a Tensile Contact Etch Stop Layer on Nanoscale Strained NMOSFETs Embedded with a Silicon-Carbon Alloy Stressor
    Lee, Chang-Chun
    Chang, Shu-Tong
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2012, 12 (07) : 5342 - 5346
  • [3] A TCAD simulation study of impact of strain engineering on nanoscale strained Si NMOSFETs with a silicon-carbon alloy stressor
    Chang, Shu-Tong
    Wang, Wei-Ching
    Lee, Chang-Chun
    Huang, Jacky
    THIN SOLID FILMS, 2009, 518 (05) : 1595 - 1598
  • [4] Simulation of a nanoscale strained Si NMOSFET with a silicon-carbon alloy stressor
    Huang, Jacky
    Chang, Shu-Tong
    Wang, Wei-Ching
    Lee, Chang-Chun
    THIN SOLID FILMS, 2010, 518 : S72 - S75
  • [5] Impact of channel width and dummy length on performance enhancement in p-type metal oxide semiconductor field effect transistor with a silicon-germanium alloy stressor
    Lee, Chang-Chun
    Huang, Jacky
    Chang, Shu-Tong
    Wang, Wei-Ching
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (03): : 1256 - 1260
  • [6] Molecular Dynamics Study of the Effect of Carbon Atoms on the Surface Tension of Silicon-carbon Alloy
    Narumi, Taka
    Shibuta, Yasushi
    Yoshikawa, Takeshi
    ISIJ INTERNATIONAL, 2020, 60 (02) : 199 - 204
  • [7] Effect of Ce incorporation into carbon layer on the performance of silicon-carbon composite as anode for LIBs
    Wang, Jing
    Mai, Yi
    Yang, Pan
    Guo, Dan
    Sun, Ruida
    Wu, Fuzhong
    Dai, Xinyi
    Gu, Yijing
    Chen, Haijun
    Cheng, Ying
    APPLIED SURFACE SCIENCE, 2023, 613
  • [8] High-performance carbon-rich amorphous silicon-carbon alloy semiconductors with low optical gaps
    Honda, Kensuke
    Matsumoto, Akari
    Kondo, Bunta
    Shimizu, Yuta
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2023, 148
  • [9] Thin body silicon-on-insulator N-MOSFET with silicon-carbon source/drain regions for performance enhancement
    Ang, KW
    Chui, KJ
    Bliznetsov, V
    Wang, YH
    Wong, LY
    Tung, CH
    Balasubramanian, N
    Li, MF
    Samudra, G
    Yeo, YC
    IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST, 2005, : 503 - 506
  • [10] Rate Performance Enhancement of Anode for Lithium-Ion Battery via Composition of Hard Carbon And Silicon-Carbon Nanofiber
    Park, Tae-Hwan
    Yeo, Jae-Seong
    Ohata, Yuzo
    Seo, Min-Hyun
    Miyawaki, Jin
    Mochida, Isao
    Yoon, Seong-Ho
    INTERNATIONAL JOURNAL OF ELECTROCHEMICAL SCIENCE, 2013, 8 (01): : 249 - 256
1234