3D sol-gel printing and sol-gel bonding for fabrication of macro- and micro/nano-structured photonic devices

被引:18
|
作者
Gvishi, Raz [1 ]
Sokolov, Ilan [2 ]
机构
[1] Soreq NRC, Photon Mat Grp, Div Appl Phys, IL-81800 Yavne, Israel
[2] Hebrew Univ Jerusalem, Inst Chem, Casali Ctr Appl Chem, IL-91904 Jerusalem, Israel
关键词
3D printing; Hybrid inorganic-organic materials; UV-curable sol-gel materials; Optical elements; Optical bonding; LASER LITHOGRAPHY; SPECTROSCOPY; TECHNOLOGY; BEAMS; UV;
D O I
10.1007/s10971-020-05270-7
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Photonic integrated circuits (PIC) can be mass-produced by 3D-printing technologies in combination with advanced hybrid inorganic-organic materials. In this work we present the development of hybrid inorganic-organic materials based on the fast sol-gel process (FSG) which can be used as a "tool kit" for the fabrication of advanced optical materials. We present routes to fabrication of FSG materials with a variety of properties: the materials may exhibit mechanical toughness or be elastic; they may be thermally and UV-curable, they can have a tailored refractive index value and tailored chemical environment, such as an aromatic matrix. Using these materials, we demonstrated strong optical bonding between optical components for solar energy and optical fiber coupler systems. We demonstrated fabrication of macroscale optical elements by 3D-printing methods, such as soft lithography, inkjet, and digital light processing (DLP) printing. We also demonstrated 3D-printing fabrication of nano/microscale optical elements by soft lithography, nanoimprint lithography (NIL), and direct laser writing (DLW). The obtained 3D-printed sol-gel optical elements were found to exhibit mechanical advantages: improved surface quality, resistance to solvents, improved adhesion to glass substrate and stability to temperature above 200 degrees C compared with 3D-printed organic polymer elements. In addition, the sol-gel elements present the following optical advantages: improved optical quality, improved optical transmission, and durability to laser radiation. We believe that this class of materials is a promising candidate for use in mass production of photonic integrated circuits (PIC) by 3D-printing technologies. UV-curable fast sol-gel (FSG) bonding and 3D printing (a) Bonding of a BK7 glass prism to a silicon-based wafer by UV curing of FSG material, where the FSG is applied in the interface between them. (b) Macroscale "cubic" shaped optical element printed by 3D Digital light processing (DLP). [GRAPHICS] .
引用
收藏
页码:635 / 648
页数:14
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