Control System for the Synthesis of Thin Films by Pulsed Laser Deposition

被引:0
|
作者
Conde, J. [1 ,2 ]
Kuo, C. [1 ]
Silveyra, J. [2 ]
机构
[1] Univ Buenos Aires, Fac Ingn, Lab Solidos Amorfos, Lab Ablac Laser, Av Paseo Colon 850, RA-1063 Buenos Aires, DF, Argentina
[2] Univ Buenos Aires, Inst Tecnol & Ciencias Ingn Hilario Fernandez Lon, CONICET, Av Paseo Colon 850, RA-1063 Buenos Aires, DF, Argentina
关键词
ablation; Arduino; embedded systems; PLD; pulsed laser deposition; thin films; TARGET; ABLATION;
D O I
10.1109/tla.2020.9085301
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
The pulsed laser ablation process is a widely used technique for thin films deposition. In this method, a pulsed laser beam focuses onto a target ablating the impact site, called spot. Since preparing the target is a highly time consuming and expensive task, the spot is generally scanned across the target's surface. A typical pulsed laser deposition configuration has a moving mirror that scans the laser beam across a rotating target. We propose ablating the target with a spiral pattern to ensure a uniform ablation and maximizing the target's efficiency. This requires moving the mirror and target in sync with variable speeds. To this end, we designed and built robust electromechanical actuators driven by stepper motors, which are electronically controlled by an Arduino-based system. The core of the firmware is a precalculated lookup table with the time intervals between the motors' steps. Thus, motor control following computationally expensive positioning functions -as the spiral pattern- are not a problem. Users may operate the control system through a user-friendly interface. The modular firmware architecture facilitates future extensions as, for example, adding other motor positioning functions to enable different ablation patterns for research purposes. This development aims to be a valuable tool for the synthesis of thin films by pulsed laser deposition.
引用
收藏
页码:438 / 445
页数:8
相关论文
共 50 条
  • [1] Control System for the Synthesis of Thin Films by Pulsed Laser Deposition
    Conde Garrido J.M.
    Kuo C.
    Silveyra J.M.
    IEEE Latin America Transactions, 2019, 18 (02): : 438 - 445
  • [2] Synthesis and characterization of graphene thin films by pulsed laser deposition
    Wang, Jin
    Yu, Jian
    Xiong, Zhengwei
    Yin, Hongbu
    Wang, Xuemin
    Cao, Linhong
    Wu, Weidong
    Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2015, 35 (08): : 1023 - 1027
  • [3] Pulsed laser deposition of thin films
    Jelinek, M
    Trtik, V
    Jastrabik, L
    PHYSICS AND MATERIALS SCIENCE OF HIGH TEMPERATURE SUPERCONDUCTORS, IV, 1997, 26 : 215 - 231
  • [4] Multitarget system for growth of thin films by pulsed laser deposition
    Herrera, M
    Castro-Rodríguez, R
    Gómez, O
    Rejon, V
    Bartolo-Pérez, P
    Barkun, S
    Martel, A
    Peña, JL
    REVISTA MEXICANA DE FISICA, 2002, 48 (01) : 61 - 66
  • [5] Deposition of SmBaCuO thin films by pulsed laser deposition
    Di Trolio, A
    Gambardella, U
    Morone, A
    Orlando, S
    ALT '97 INTERNATIONAL CONFERENCE ON LASER SURFACE PROCESSING, 1998, 3404 : 99 - 103
  • [6] Synthesis and Properties of Ceria Thin Films Prepared by Pulsed Laser Deposition
    Balakrishnan, G.
    Kuppusami, P.
    Sairam, T. N.
    Thirumurugesan, R.
    Mohandas, E.
    Sastikumar, D.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (09) : 5421 - 5424
  • [7] Synthesis and characterization of PLZT thin films obtained by pulsed laser deposition
    Verardi, P
    Craciun, F
    Scarisoreanu, N
    Epurescu, G
    Dinescu, M
    Vrejoiu, I
    Dauscher, A
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6): : 1283 - 1285
  • [8] Synthesis and characterization of PLZT thin films obtained by pulsed laser deposition
    P. Verardi
    F. Craciun
    N. Scarisoreanu
    G. Epurescu
    M. Dinescu
    I. Vrejoiu
    A. Dauscher
    Applied Physics A, 2004, 79 : 1283 - 1285
  • [9] Synthesis of tungsten carbide thin films by reactive pulsed laser deposition
    Chitica, N
    Gyorgy, E
    Lita, A
    Marin, G
    Mihailescu, IN
    Pantelica, D
    Petrascu, M
    Hatziapostolou, A
    Grivas, C
    Broll, N
    Cornet, A
    Mirica, C
    Andrei, A
    THIN SOLID FILMS, 1997, 301 (1-2) : 71 - 76
  • [10] Pulsed laser ablation and deposition of thin films
    Ashfold, MNR
    Claeyssens, F
    Fuge, GM
    Henley, SJ
    CHEMICAL SOCIETY REVIEWS, 2004, 33 (01) : 23 - 31