Investigation of Si-B-C-N coatings produced by ion sputtering of SiBC target

被引：4

作者：

Kiryukhantsev-Korneev, Ph. V. ^{[1
]}

Sheveyko, A. N. ^{[1
]}

Lemesheva, M. ^{[1
]}

Rupasov, S. I. ^{[1
]}

Levashov, E. A. ^{[1
]}

机构：

[1] Natl Univ Sci & Technol MISIS, Leninskii Pr 4, Moscow 119049, Russia

来源：

PROTECTION OF METALS AND PHYSICAL CHEMISTRY OF SURFACES | 2017年 / 53卷 / 05期

关键词：

SiBC cathodes; Si-B-C-N coatings; ion sputtering; hardness; wear resistance; heat resistance; THERMAL-STABILITY; MECHANICAL-PROPERTIES; OXIDATION RESISTANCE; FILMS; TEMPERATURES; PROTECTION; SURFACE; SYSTEM;

D O I：

10.1134/S2070205117050094

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

Using the method of ion sputtering of sintered Si-B-C targets, amorphous Si-B-C-N thin-film coatings with different nitrogen contents have been prepared. The structures of coatings are studied by the methods of X-ray phase analysis, scanning electron microscopy, glow-discharge optical-emission spectroscopy, infrared spectroscopy, and Raman spectroscopy. The mechanical properties of the obtained coatings are determined using the nanoindentation method. To evaluate the oxidation resistance of the coatings, they are annealed in air at temperatures of 1000, 1100, and 1200A degrees C. It is established that coatings of the optimal composition show a hardness of 26 GPa, an elastic modulus of 221 GPa, and an elastic recovery of 65%. The coatings obtained in the medium consisting of Ar and 15% N-2 are oxidation-resistant at temperatures of up to 1200A degrees C owing to the formation of a SiO2-based protective film on their surface.

引用

页码：873 / 878

页数：6

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