On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

被引：1

作者：

Akhmetov, T. D. ^{[1
,2
]}

Ivanov, A. A. ^{[1
,2
]}

Shikhovtsev, I. V. ^{[1
,2
]}

机构：

[1] Russian Acad Sci, Siberian Branch, Budker Inst Nucl Phys, Novosibirsk 630090, Russia

[2] Novosibirsk State Univ, Novosibirsk 630090, Russia

来源：

PLASMA PHYSICS REPORTS | 2021年 / 47卷 / 07期

关键词：

quasi-stationary approximation; magnetostatics; solenoid; antenna; plasma generator; vortex field; shield; ION-SOURCE;

D O I：

10.1134/S1063780X21070011

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

引用

页码：732 / 741

页数：10

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