PVD and CVD technologies

被引：0
|
作者：
Watanabe, S
Miyake, S
机构：
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 1996年 / 41卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
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页码：905 / 910
页数：6
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