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- [8] Morphological change and inhibitory effect on Ag surface by ArF excimer laser irradiation JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (3A): : 1268 - 1271
- [9] Morphological change and inhibitory effect on Ag surface by ArF excimer laser irradiation Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2000, 39 (3 A): : 1268 - 1271
- [10] KrF excimer laser process. Lateral and surface modification for enhancing resist contrast Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1992, 31 (6 A): : 1928 - 1932