Photoelectric soft x-ray multi-layer coating thickness control-system

被引：0
|
作者：
Xuan, M [1 ]
Chen, B [1 ]
Liu, Z [1 ]
机构：
[1] Changchun Inst Opt & Fine Mech, Changchun 130022, Peoples R China
来源：
INSTRUMENTS FOR OPTICS AND OPTOELECTRONIC INSPECTION AND CONTROL | 2000年 / 4223卷
关键词：
multi-sensor fusion; soft X-ray; multi-layer coating; thickness control;
D O I：
10.1117/12.401769
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper introduces a photoelectric soft X-ray multi-layer thickness control system. This paper highlights the operating principle of ion beam sputter coating system, the hardware and software scheme of coating thickness auto-control system.
引用
收藏
页码：114 / 117
页数：4
相关论文
共 50 条
  • [1] A succinct design method of soft x-ray multi-layer mirror
    Song, LM
    Hu, JS
    INSTRUMENTS FOR OPTICS AND OPTOELECTRONIC INSPECTION AND CONTROL, 2000, 4223 : 149 - 152
  • [2] A FINITE ELEMENT SIMULATION ANALYSIS OF MULTI-LAYER SOFT X-RAY SPECTROMETER
    Hou Li-Fei
    Liao Qiang
    Yi Rong-Qing
    Liu Shen-Ye
    JOURNAL OF ADVANCED MANUFACTURING SYSTEMS, 2008, 7 (01) : 59 - 63
  • [3] X-ray masks with multi-layer holding membrane
    Gentselev, A.N.
    Goldenberg, B.G.
    Lemzyakov, A.G.
    Applied Physics, 2020, (05): : 109 - 115
  • [4] Structual and thickness distribution evaluation of a multi-layer photomask blank with a X-ray reflectivity method
    Hirano, T
    Wada, H
    Otaki, M
    Matsuo, R
    PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY VII, 2000, 4066 : 503 - 513
  • [5] SOFT X-RAY PHOTOELECTRIC YIELD FORMULAS
    OGIER, WT
    ELLIS, DV
    JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) : 3788 - &
  • [6] CMP control of multi-layer intet-layer dielectrics (ILD) using X-ray reffectivity
    Bryant, Ross E.
    Porter, Hethel
    Gallegos, Jesus
    O'Dell, Jeremy
    Agnihotri, Dileep
    FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007, 2007, 931 : 216 - +
  • [7] Simultaneous determination of layer thickness and composition in complex multi-layer samples with FP-multi software and X-ray fluorescence spectrometry
    Song, Wuyuan
    Zheng, Lianguo
    Li, Yan
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2005, 230 : U184 - U185
  • [8] Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance
    Wang, Wei
    Ni, Yuan-Long
    Wan, Bing-Gen
    Sun, Jin-Ren
    Wu, Jiang
    Wang, Chen
    Sun, Yu-Qin
    Zhou, Guan-Lin
    Gu, Yuan
    Wang, Shi-Ji
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2001, 13 (05): : 525 - 528
  • [9] X-RAY STUDIES OF DISLOCATIONS IN MULTI-LAYER Cu FILMS.
    Zwui, S.
    Guan, H.
    Applied Physics A: Solids and Surfaces, 1986, A39 (01): : 65 - 66
  • [10] Fabrication Multi-layer Polymer Microstructures by X-ray Lithography with Alignment
    Li, Yigui
    Sugiyama, Susumu
    OPTOELECTRONIC MATERIALS, PTS 1AND 2, 2010, 663-665 : 1016 - +
12345