Modelling Q-factors of micro pillars

被引:0
|
作者
Nielsen, T. R. [1 ]
Gregersen, N. [1 ]
Tromborg, B. [1 ]
Mork, J. [1 ]
机构
[1] Tech Univ Denmark, Dept Commun Opt & Mat, Nano DTU, COM DTU, Bldg 343, DK-2800 Lyngby, Denmark
关键词
microstructure devices; resonators; photonic integrated circuits;
D O I
10.1109/ICTON.2007.4296176
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The influence of fabrication induced imperfections on quality factors for a microcavity pillar is studied numerically. The dependence on side-wall inclination and etch variations is quantified.
引用
收藏
页码:188 / +
页数:2
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