Diamond-like carbon film properties from optical and electrical measurements

High resistivity diamond-like carbon films have been grown on a variety of substrate surfaces using RF generated high-current hydrocarbon ion beams at low pressures. Stable films have been obtained in the thickness range of 0.3 to 1.2 mu m with resistivities exceeding 10(13) Omega-cm. These films have been deposited on smooth surfaces such as oxidized silicon, glass, quartz, aluminum and plastics. The films have smooth surfaces, great hardness and moderate dielectric constant (2.2 to 3.5). Optical absorption measurements show that these films are highly absorbing in the ultraviolet region of the spectrum and in the visible range their absorption coefficients exceed 10(4) cm(-1) and the refractive indices fall in the range 1.75 to 2.17 at 632.8 nm.