Performance analysis and evaluation of direct phase measuring deflectometry

被引:56
|
作者
Zhao, Ping [1 ]
Gao, Nan [1 ]
Zhang, Zonghua [1 ,2 ]
Gao, Feng [2 ]
Jiang, Xiangqian [2 ]
机构
[1] Hebei Univ Technol, Sch Mech Engn, 8 Dingzigu 1 Rd, Tianjin 300130, Peoples R China
[2] Univ Huddersfield, Ctr Precis Technol, Huddersfield HD1 3DH, W Yorkshire, England
基金
英国工程与自然科学研究理事会; 中国国家自然科学基金; 国家重点研发计划;
关键词
Error analysis; Performance evaluation; Simulation; Direct phase measuring deflectometry; 3D shape measurement; Specular object; 3D SHAPE MEASUREMENT; FRINGE PROJECTION; ASPHERIC MIRROR; SYSTEM; SURFACE;
D O I
10.1016/j.optlaseng.2017.11.008
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Three-dimensional (3D) shape measurement of specular objects plays an important role in intelligent manufacturing applications. Phase measuring deflectometry (PMD)-based methods are widely used to obtain the 3D shapes of specular surfaces because they offer the advantages of a large dynamic range, high measurement accuracy, full-field and noncontact operation, and automatic data processing. To enable measurement of specular objects with discontinuous and/or isolated surfaces, a direct PMD (DPMD) method has been developed to build a direct relationship between phase and depth. In this paper, a new virtual measurement system is presented and is used to optimize the system parameters and evaluate the system's performance in DPMD applications. Four system parameters are analyzed to obtain accurate measurement results. Experiments are performed using simulated and actual data and the results confirm the effects of these four parameters on the measurement results. Researchers can therefore select suitable system parameters for actual DPMD (including PMD) measurement systems to obtain the 3D shapes of specular objects with high accuracy. (C) 2017 Elsevier Ltd. All rights reserved.
引用
收藏
页码:24 / 33
页数:10
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