Calibrations on Shear Angle Detections in Vertically Stacked Capacitive Tactile Sensors

被引:4
|
作者
Chen, Yu-Wen [1 ]
Chandra, Mochtar [2 ]
Lo, Cheng-Yao [1 ,2 ]
机构
[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu 300044, Taiwan
[2] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300044, Taiwan
关键词
Accuracy; calibration; shear angle; tactile sensor; SPATIAL-RESOLUTION; ENHANCEMENT;
D O I
10.1109/JSEN.2021.3069075
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Four factors that contribute to shear angle derivation tolerances in a vertically stacked capacitive tactile sensor with the highest detection sensitivity were thoroughly studied. The fringe effect that appears in a sensing array was found as an environmental factor contributing to the tolerance (0.031 degrees); the torsional deformation that appears in the electrode was found as a structural factor contributing to the tolerance (0.011 degrees); the torque-induced deformation generated from the bump was found as an applicational factor contributing to the tolerance (0.087 degrees); and the asymmetrical stress distribution in the elastomeric dielectric was found as an operational factor contributing to the tolerance (- 0.968 degrees). The effects of these factors were neglected in previous related studies. This paper provides a calibration solution for each case. Additionally, tolerances projected from the contributions of these factors under different conditions are provided with high coefficients of determination based on corresponding regressions. This paper provides scientific and quantified tolerances for verifying the derived shear angle when accurate detection is desired.
引用
收藏
页码:26269 / 26276
页数:8
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