Thermal expansion coefficient tailoring of LAS glass-ceramic for anodic bondable low temperature co-fired ceramic application

被引:21
|
作者
Wei, Anqing [1 ,2 ]
Liu, Zhifu [1 ,2 ]
Zhang, Faqiang [1 ]
Ma, Mingsheng [1 ]
Chen, Guanyu [1 ,2 ]
Li, Yongxiang [3 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Ceram, CAS Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] RMIT Univ, Sch Engn, Melbourne, Vic 3000, Australia
基金
中国国家自然科学基金;
关键词
Anodic bonding; Thermal expansion; Spodumene; Glass-ceramic; X-RAY-DIFFRACTION; LI2O-AL2O3-SIO2; GLASS; ALUMINOSILICATE GLASS; NUCLEATING-AGENT; CRYSTALLIZATION; ZRO2; SPODUMENE; LITHIUM; DESIGN; TIO2;
D O I
10.1016/j.ceramint.2019.10.209
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The Li-Al-Si glass-ceramics were prepared by conventional glass-ceramic fabrication method. The influences of Na2O content on the sintering property, microstructure, and coefficient of thermal expansion were investigated. The results show that the coefficient of thermal expansion of LAS glass-ceramics can be tailored to match that of silicon by the addition of Na2O content. Na2O has a remarkable influence on the crystallinity of Li-Al-Si glass-ceramic. The coefficient of thermal expansion of Li-Al-Si glass-ceramic is thus tunable between that of glass phase and crystal phase. The Si-O bond length change in stretch vibration modes introduced by Na2O also contributes to the variation of coefficient of thermal expansion of the Li-Al-Si glass-ceramics. The coefficient of thermal expansion of the Li-Al-Si glass-ceramic with 1.5 wt% Na2O addition is about + 3.34 ppm/degrees C at 350 degrees C and shows a good compatibility to that of silicon in a wide temperature range, which makes it a promising candidate for anodic bondable low temperature co-fired ceramic substrate applications.
引用
收藏
页码:4771 / 4777
页数:7
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