Vacuum microelectronic devices

Vacuum microelectronics (VME) concerns the design and manufacture of vacuum devices and components built to sizes and tolerances similar to those found in solid-state microelectronic devices. This technology is well suited for use in electron devices of commercial importance, particularly flat-panel displays. The flat-panel display industry is projected to have annual revenues measured in the tens of billions of dollars by the turn of the century. Other devices of particular importance include microwave tubes. Because of the high electron current densities available at room temperature with field emission, field-emitter arrays find application in microwave tube technology. We begin this paper by discussing the physical characteristics of micro-field-emission sources important to device applications. These characteristics include fundamental features such as current-voltage data and limits to the emitted electron current, in addition to engineering considerations, such as life expectancy and procedures for tube assembly. We conclude with a discussion of the application of vacuum microelectronics to flat-panel display and microwave tube technology.