Physics and applications of short pulser laser ablation

被引：0
|
作者：
Stuke, M [1 ]
机构：
[1] Max Planck Inst Biophys Chem, D-37018 Gottingen, Germany
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1998年 / 53卷 / 288期
关键词：
laser ablation; sub-picosecond pulses; submicron patterning;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this article, are reviewed the physics and applications of short pulser laser ablation for advanced surface processing of metals, polymers and other materials used in integrated optics and micro-electronics.
引用
收藏
页码：484 / +
页数：33
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