Study on the focusing performance of the compound X-ray refractive lenses with fabrication errors

被引：2

作者：

Le Zi-Chun ^{[1
]}

Zhang Ming ^{[1
]}

Dong Wen ^{[1
]}

Quan Bi-Sheng ^{[1
]}

Liu Wei ^{[1
]}

Liu Kai ^{[1
]}

机构：

[1] Zhejiang Univ Technol, Dept Appl Phys, Coll Sci, Hangzhou 310023, Zhejiang, Peoples R China

来源：

ACTA PHYSICA SINICA | 2010年 / 59卷 / 09期

基金：

中国国家自然科学基金;

关键词：

compound X-ray refractive lens; fabrication error; X-ray focusing; synchrontron radiation; REFLECTION;

D O I：

10.7498/aps.59.6284

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The compound X-ray refractive lens is a kind of optical components for X-rays focusing and imaging. This paper reports the authors' research on focusing performance of the compound X-ray refractive lens with fabrication errors. Firstly SEM measurements of the semi-cylindrical PMMA compound X-ray refractive lens fabricated by means of deep X-ray lithography are performed, and accordingly the fabrication errors are measured. Then the theoretical analysis and simulations are done for the focusing performance of the compound X-ray refractive lens with the fabrication errors. Finally, X-ray microbeam experimental system is built on the 4W1A beamline of Beijing Synchrotron Radiation Facility (BSRF) for measuring the focusing performance of the semi-cylindrical PMMA X-ray refractive lenses we fabricated. And the focusing performances of the semi-cylindrical PMMA compound X-ray refractive lenses with and without distinct fabrication errors are measured and analyzed under 8 keV monochromatic X-rays.

引用

页码：6284 / 6289

页数：6

共 13 条

[1] SUB-100 NM-RESOLUTION GRAZING-INCIDENCE SOFT-X-RAY MICROSCOPE WITH A LASER-PRODUCED PLASMA SOURCE
AOKI, S
OGATA, T
SUDO, S
ONUKI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (10): : 3477 - 3480
[2] BEAZ A, 1961, J OPT SOC AM, V51, P405
[3] Synchrotron hard x-ray microprobe:: Fluorescence imaging of single cells
Bohic, S
Simionovici, A
Snigirev, A
Ortega, R
Devès, G
Heymann, D
Schroer, CG
[J]. APPLIED PHYSICS LETTERS, 2001, 78 (22) : 3544 - 3546
[4] X-ray standing wave microscopy: Chemical microanalysis with atomic resolution
Drakopoulos, M
Zegenhagen, J
Snigirev, A
Snigireva, I
Hauser, M
Eberl, K
Aristov, V
Shabelnikov, L
Yunkin, V
[J]. APPLIED PHYSICS LETTERS, 2002, 81 (12) : 2279 - 2281
[5] The reflectivity measurement of the 28.5nm multilayer mirror
Huang, WZ
Li, YJ
Gu, YQ
Zhang, J
You, YL
Cun, YS
He, YL
Lei, AL
Chen, CL
Ma, YY
Jin, CS
[J]. ACTA PHYSICA SINICA, 2003, 52 (04) : 809 - 812
[6] MULTIPLE REFLECTION FROM SURFACE X-RAY OPTICS
KUMAKHOV, MA
KOMAROV, FF
[J]. PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 1990, 191 (05): : 289 - 350
[7] Application of quantum scattering theory to 2-D focusing multilayer reflection circular zone plate
Le, ZC
Pan, SF
[J]. OPTICS COMMUNICATIONS, 1999, 159 (4-6) : 285 - 292
[8] A formulation for the performance of compound x-ray refractive lenses
Le, ZC
Liang, JQ
[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2003, 5 (04): : 374 - 379
[9] Le ZC, 2007, CHINESE PHYS, V16, P984, DOI 10.1088/1009-1963/16/4/020
[10] LIANG JQ, 2005, OPTICS PRECISION ENG, V13, P60

← 1 2 →