Particle visualization in high-power impulse magnetron sputtering. II. Absolute density dynamics

被引：31
|
作者：
Britun, Nikolay [1 ]
Palmucci, Maria [1 ]
Konstantinidis, Stephanos [1 ]
Snyders, Rony [1 ,2 ]
机构：
[1] Univ Mons, CIRMAP, Chim Interact Plasma Surface ChIPS, B-7000 Mons, Belgium
[2] Mat Nova Res Ctr, B-7000 Mons, Belgium
来源：
JOURNAL OF APPLIED PHYSICS | 2015年 / 117卷 / 16期
关键词：
ABSORPTION-SPECTROSCOPY; DISCHARGE; PLASMA; ATOMS; DIAGNOSTICS; TECHNOLOGY; DEPOSITION; EMISSION; DC; TI;
D O I：
10.1063/1.4919007
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering discharge has been performed. The present, second, paper of the study is related to the discharge characterization in terms of the absolute density of species using resonant absorption spectroscopy. The results on the time-resolved density evolution of the neutral and singly-ionized Ti ground state atoms as well as the metastable Ti and Ar atoms during the discharge on-and off-time are presented. Among the others, the questions related to the inversion of population of the Ti energy sublevels, as well as to re-normalization of the two-dimensional density maps in terms of the absolute density of species, are stressed. (C) 2015 AIP Publishing LLC.
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页数：15
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