Electromechanical Piezoresistive Sensing of Graphene-based Intracranial Pressure Sensor

被引:0
|
作者
Mohamad, M. [1 ,2 ]
Soin, N. [1 ,3 ]
Ibrahim, F. [3 ,4 ]
机构
[1] Univ Malaya, Fac Engn, Elect Engn Dept, Kuala Lumpur 50603, Malaysia
[2] Univ Tun Hussein Onn Malaysia, Fac Elect & Elect Engn, Dept Elect Engn, Batu Pahat 86400, Johor, Malaysia
[3] Univ Malaya, Fac Engn, Ctr Innovat Med Engn, Kuala Lumpur 50603, Malaysia
[4] Univ Malaya, Fac Engn, Biomed Engn Dept, Kuala Lumpur 50603, Malaysia
关键词
pressure sensor; MEMS; diaphragm; DIAPHRAGM;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Graphene shows a promising future in the application of biomedical sensors as the piezoresistive sensing elements due to its electromechanical properties. This paper presents the fundamental development stage of graphene-based piezoresistive intracranial pressure sensor, i.e. to determine its diaphragm design, which is made of polydimethylsiloxane polymer. Different thicknesses of a square diaphragm were simulated using COMSOL Multiphysics. The Parametric Sweep function was used to simultaneously simulate the changes of two parameters, namely diaphragm thickness and operating pressure. It was found that the thin diaphragm is more susceptible to deform due to the rapid geometry changes and the differences in modulus of elasticity of the materials used in the design. Meanwhile, the stress experienced by the diaphragm degraded with the increase in thickness. However, a slight modification in designing and positioning the piezoresistors would make the sensor's performance on par with those of thin diaphragm. Hence, by selecting the right thickness and shape of polydimethylsiloxane diaphragm, it will serve as a good platform in developing the graphene-based piezoresistive intracranial pressure sensor.
引用
收藏
页码:25 / 26
页数:2
相关论文
共 50 条
  • [1] Piezoresistive Effect of Interdigitated Electrode Spacing Graphene-based MEMS Intracranial Pressure Sensor
    Rahman, S. H. A.
    Soin, N.
    Ibrahim, F.
    2018 IEEE 8TH INTERNATIONAL NANOELECTRONICS CONFERENCES (INEC), 2018, : 27 - 28
  • [2] Graphene-based Piezoresistive Pressure Sensing for Uniaxial and Biaxial Strains
    Smith, Anderson David
    Niklaus, Frank
    Vaziri, Sam
    Fischer, Andreas C.
    Forsberg, Fredrik
    Schroder, Stephan
    Ostling, Mikael
    Lemme, Max Christian
    2014 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW), 2014,
  • [3] DESIGN OF GRAPHENE-BASED MEMS INTRACRANIAL PRESSURE SENSOR
    Rahman, S. H. A.
    Soin, N.
    Ibrahim, F.
    2016 IEEE INTERNATIONAL SYMPOSIUM ON MEDICAL MEASUREMENTS AND APPLICATIONS (MEMEA), 2016, : 568 - 572
  • [4] Piezoresistive effects in controllable defective HFTCVD graphene-based flexible pressure sensor
    Muhammad Aniq Shazni Mohammad Haniff
    Syed Muhammad Hafiz
    Khairul Anuar Abd Wahid
    Zulkarnain Endut
    Hing Wah Lee
    Daniel C. S. Bien
    Ishak Abdul Azid
    Mohd. Zulkifly Abdullah
    Nay Ming Huang
    Saadah Abdul Rahman
    Scientific Reports, 5
  • [5] Piezoresistive effects in controllable defective HFTCVD graphene-based flexible pressure sensor
    Haniff, Muhammad Aniq Shazni Mohammad
    Hafiz, Syed Muhammad
    Abd Wahid, Khairul Anuar
    Endut, Zulkarnain
    Lee, Hing Wah
    Bien, Daniel C. S.
    Azid, Ishak Abdul
    Abdullah, Mohd. Zulkifly
    Huang, Nay Ming
    Rahman, Saadah Abdul
    SCIENTIFIC REPORTS, 2015, 5
  • [6] Graphene based piezoresistive pressure sensor
    Zhu, Shou-En
    Ghatkesar, Murali Krishna
    Zhang, Chao
    Janssen, G. C. A. M.
    APPLIED PHYSICS LETTERS, 2013, 102 (16)
  • [7] PIEZORESISTIVE SENSING MECHANISM OF GRAPHENE-BASED ELECTRONIC SKIN
    Li, Li
    Huang, Jia
    Yang, Wenbin
    JOURNAL OF THEORETICAL AND APPLIED MECHANICS, 2025, 63 (01) : 51 - 58
  • [8] Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes
    Smith, A. D.
    Niklaus, F.
    Paussa, A.
    Vaziri, S.
    Fischer, A. C.
    Sterner, M.
    Forsberg, F.
    Delin, A.
    Esseni, D.
    Palestri, P.
    Ostling, M.
    Lemme, M. C.
    NANO LETTERS, 2013, 13 (07) : 3237 - 3242
  • [9] Highly Sensitive Piezoresistive Graphene-Based Stretchable Composites for Sensing Applications
    Costa, P.
    Goncalves, S.
    Mora, H.
    Carabineiro, S. A. C.
    Viana, J. C.
    Lanceros-Mendez, S.
    ACS APPLIED MATERIALS & INTERFACES, 2019, 11 (49) : 46286 - 46295
  • [10] Residual Stress of Graphene-Based MEMS ICP Piezoresistive Pressure Sensors
    Abd Rahman, Siti Hajar
    Soin, Norhayati
    Ibrahim, Fatimah
    Soin, Norhayati
    Ibrahim, Fatimah
    2016 INTERNATIONAL CONFERENCE ON BIO-ENGINEERING FOR SMART TECHNOLOGIES (BIOSMART), 2016,