Reliability Evalution of Low-cost Bumping by Laser Jetting Sn-Ag-Cu Solder on Electroless Ni/Au UBM

被引:0
|
作者
Gai, Wei [1 ]
Xu, Gaowei [1 ]
Luo, Le [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China
关键词
low-cost; laser-based solder jetting; electroless Ni/Au; shear force; interconnect reliability;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The technology of electroless Ni/Au UBM and laser jetting solder are attractive in flip chip package for its low-cost and flexibility. In this study, the solder ball was bumped on electroless Ni/Au UBM through laser jetting technology. Scanning Electron Microscope (SEM) was used to investigate the pad surface morphology after electroless Ni/Au deposition. The deposition itself was isotropic, and a smooth nickel surface was obtained. The die shear test was conducted to investigate the correlation between the thickness of electroless Ni and shear force. With the increase of electroless Ni thickness, the shear force was much improved. With the thickness of electroless Ni being 5.4um and 7.7um respectively, the failure occurred at the interface of sold joint and substrate. In such cases, the interface stress at electroless Ni layer and pad was comparatively small. Hence the interconnect kept highly reliable. The die shear force achieved 2.8Kg with electroless Ni thickness of 5.4um, more than the requirement of 2.5Kg by MIL-STD-883H.
引用
收藏
页码:156 / 159
页数:4
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