Effect of wavelength-modulating parameters on intensity fluctuations of the light source in a photothermal-modulating laser-diode interferometer

被引：7
|
作者：
Wang, XZ
Lu, HB
Wang, XF
Yu, DY
Qian, F
Fang, ZJ
机构：
[1] Acad Sinica, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
[2] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 201800, Peoples R China
来源：
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 2001年 / 3卷 / 03期
关键词：
interferometer; photothermal effect; laser diode; optical testing;
D O I：
10.1088/1464-4258/3/3/313
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In the laser diode interferometer with a photothermal wavelength modulation which is used for optical fine measurement, intensity fluctuations of the light source cause measurement errors though the fluctuations decrease greatly as compared with the injection current modulation of wavelength. In this paper, we investigated the effect of photothermal-modulation parameters of wavelength on the intensity fluctuations of the light source. Choosing appropriate photothermal-modulation parameters, we measured microdisplacements of objects with a high measurement accuracy.
引用
收藏
页码：222 / 224
页数：3
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