Spectral modulation of blocked-impurity-band hybrid structure terahertz detector

被引:7
|
作者
Wang, Bingbing [1 ,2 ]
Chen, Yulu [3 ]
Tong, Wulin [3 ]
Zhou, Yangzhou [3 ]
Tao, Jiajia [3 ]
Wang, Zewen [3 ]
Dong, Zuoru [3 ]
Zhou, Hong [4 ]
Fu, Zhanglong [1 ]
Shao, DiXiang [1 ]
Wang, Xiaodong [3 ]
Cao, Juncheng [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Key Lab Terahertz Solid State Technol, 865 Chang Ning Rd, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] 50 Res Inst China Elect Technol Grp Corp, 318 Chang He Rd, Shanghai 200331, Peoples R China
[4] CETC Publ Facil Operat Management CO LTD, 318 Chang He Rd, Shanghai 200331, Peoples R China
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
INFRARED REFLECTANCE SPECTRA;
D O I
10.1063/5.0082048
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper is a study composed of experiment and simulation. We conceived a blocked-impurity-band hybrid structure for terahertz radiation detection. The modulation effect of sub-wavelength metal grating on light absorption has been analyzed theoretically. The optical absorption and spectral response of sub-wavelength metal grating/Si:P blocked-impurity-band hybrid structure detectors are simulated by Finite Difference-Time Domain solution. Compared with the detector without grating structure, the hybrid structure detectors have the effects of selective absorption amplification and filtering. Moreover, the fabrication and experimental details of the hybrid structure detectors have been investigated. The results show that the response peak wavelength 18.3 mu m of the Si:P blocked-impurity-band detector has been modulated to 14.3, 22.8, 28.2, and 33.1 mu m (& SIM;9.1 THz). Especially, about 140% absorption enhancement is achieved at the response peak wavelength 28.2 mu m. Furthermore, the modulation mechanisms of spectral responses on operation bias voltages and temperatures have also been studied. This study provided an effective method to modulate the spectral response of the Si:P BIB detector.
引用
收藏
页数:7
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