Adaptive high precision control for piezo-actuated nano-positioner

被引：0

作者：

Ozaki, Toshikuni ^{[1
]}

Chen, Xinkai ^{[2
]}

机构：

[1] Shibaura Inst Technol, Grad Sch, Minuma Ku, 307 Fukasaku, Saitama 3378570, Japan

[2] Shibaura Inst Technol, Dept Elect Informat Syst, Minuma Ku, Saitama 3378570, Japan

来源：

2010 IEEE INTERNATIONAL SYMPOSIUM ON INTELLIGENT CONTROL | 2010年

关键词：

VIBRATION COMPENSATION; SPECIAL-ISSUE; HYSTERESIS; IDENTIFICATION; DYNAMICS; SYSTEMS; CREEP;

D O I：

10.1109/ISIC.2010.5612884

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.

引用

页码：2278 / 2283

页数：6

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